Technical Capability

01Cleanable Materials

Metal and Alloy
Ceramic
Quartz
Glass
Sapphire
Polymer
Silicon
Coated Parts

02Removable Pollutants

Organic Compound
Oxide
Hydrocarbon
Particle (submicron)
Oil
Grease
Hydroxide
Thin Film
Inorganic Substance
Coating
Metal

03Cleaning Method

Chemical Cleaning
Degreasing
Oxidizing/Reducing Agent
Alkali/Acid Etchant
Deionized Water Cleaning
Selective Etching
Physical/Mechanical Cleaning
High Pressure
CO2 Cleaning
Sandblasting
Ultrasonic Cleaning
Polishing
Arc Spraying

Cleaning Process

Preliminary Process (Outside Cleanroom)
  • Incoming Inspection

  • Chemical Agents Cleaning

  • Sandblasting

  • Spray

  • Surface Grinding

  • Ultrasonic Cleaning

  • High-Pressure Water Cleaning

  • CO2  Cleaning

  • Transfer to Cleanroom

Subsequent Process (Inside Cleanroom)
  • Ultrasonic Cleaning

  • Ultrapure Water Rinsing

  • Compressed Air Drying

  • Oven-Dried

  • Inspection

  • Vacuum Packaging

  • Shipping

Cleaning Equipment

Comparison Before and After Cleaning

BeforeAfter

ESC

BeforeAfter

ETCH

BeforeAfter

PVD

BeforeAfter

Si Electrode

0.1 UM PARTICLE/CM²
(SPEC- ≤ 1/CM²)
1 2 3 4 5 6
0.02 0.03 0.02 0.01 0.03 0.02
UNIT ELEMENTS (AL) (CA) (CR) (CO) (CU) (FE) (K) (NA) (TI)
1E10ATOMS
/CM²
SPEC 300 200 100 100 100 100 200 200 100
sample 56 46 15 20 5 7 46 68 16

2025 @ Japan Fine Materials Corporation Privacy Policy

Application form Inquiry phone