Yttrium Oxide
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Yttrium Oxide
Yttrium oxide(Y₂O₃)is a ceramic material with unique properties such as diamagnetism and excellent transparency. It serves as a vital additive in ceramic manufacturing, significantly enhancing the quality and performance of related ceramic materials and products.
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Material Properties
- High Melting Point
- High Thermal Conductivity
- Low Thermal Expansion Coefficient
- High Dielectric Properties
- Excellent Corrosion Resistance
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Applications
Windows
JFM provides customized yttrium oxide ceramic window solutions. As chamber lids for semiconductor etching equipment, yttrium oxide ceramic windows withstand high temperatures, efficiently transmit RF energy, and resist corrosion, ensuring etching process stability and component durability.
Customizable Machining
Reverse engineering from drawings and samples.
Rings
Ceramic rings products are widely used in semiconductors due to their high hardness, wear resistance, corrosion resistance, insulation properties, and long service life. They are commonly employed in high-temperature and corrosive process chambers, significantly extending equipment maintenance intervals.
Customizable Machining
Reverse engineering from drawings and samples.
Disc
Yttrium oxide ceramic discs play a critical role in etching equipment chambers and windows, protecting against plasma erosion. They are also ideal materials for CMP polishing tables and are suitable for key components in deposition equipment, ensuring precision and efficiency in semiconductor manufacturing.
Customizable Machining
Reverse engineering from drawings and samples.
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