Windows

Product Description

Ceramic windows are essential in semiconductor etching machines, ensuring vacuum sealing and stability in harsh conditions involving high temperatures and acid-alkali corrosion. JFM offers customized solutions using high-purity alumina and yttria materials, utilizing precise forming, sintering, machining, and surface treatment to meet stringent industry standards and extreme environments.
Product Properties

Abrasion Resistance

Heat Resistance

Corrosion Resistance

Plasma Corrosion Resistance

High Strength and High Hardness

Customize the product according to your usage

We would like to improve your product design, improve performance and reduce costs to suit your needs

Enhancement of after-sales services for product applications

		Alumina							Yttria
Item (JFM)	Unit	JC-AZ025A	JC-A995A	JC-A990A	JC-A995A	JC-A997A	JC-A997B	JC-A999A	JC-Y100A
Physical Property
Content	%	-	95.0%	99.0%	99.5%	99.7%	99.7%	99.9%	-
Colour		Milky White	White	White	Milky White	Milky White	Milky White	White	Greyish White
Density	g/cm3	4.4	3.7	3.8	3.9	3.92	3.94	3.95	4.9
Mechanical Behavior
Vickers Hardness	GPa	15	13.7	15.2	16.0	17.2	17.2	17.5	6
Bending Strength	Mpa	650	350	310	360	380	380	400	130
Compressive Strength	Mpa	-	-	2160	2350	2380	2400	2560	3000
Young's Modulus	GPa	320	320	360	370	380	380	380	160
Poisson's Ratio	/	0.25	0.23	0.23	0.23	0.23	0.23	0.23	-
Fracture Toughness	Mpa.m1/2	5	3-4	3-4	4	4.8	5	5.4	1.1
Thermal Property
Coefficient of Thermal Expansion	10-6/°C	9	7.2	7.2	7.2	7.2	7.2	7.2	7.2
Thermal Conductivity	W/(m.K)	19	24	29	32	32	32	34	14
Specific Heat Capacity	J/(g.K)	-	0.78	0.79	0.78	0.79	0.79	0.78	0.45
Maximum Operating Temperature	°C	1600	1500	1600	1600	1600	1600	1600	1800
Electrical Property
Dielectric Strength	kv/mm	-	15	15	15	15	15	15	11
Dielectric Constant （1MHz）	-	-	9.4	9.9	9.9	9.9	9.9	9.9	11
Dielectric Losses （1MHz）	（X10-4）	-	4	2	1	1	1	1	5
Volume Resistivity 20℃	Ω.cm	>10¹²	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹³
Volume Resistivity 300℃	Ω.cm	-	10¹⁰	10¹⁰	10¹³	10¹³	10¹³	10¹³	10¹⁰

* This data is an example of test results in lab. It may be different from the actual characteristics in a particular manufacturing process.

* This data is an example of test results in lab. It may be different from the actual characteristics in a particular manufacturing process.

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