Ceramic Parts for Ion Implantation Equipment

JFM delivers high-performance ceramic solutions for ion implantation equipment, specializing in custom alumina and silicon nitride components like bearing guides, vacuum chucks, and insulated carriers. Our advanced materials and precision engineering overcome critical challenges including particle contamination, thermal deformation, and charge accumulation, ensuring reliable performance in extreme operating conditions.

Air Bearing Components

We customize air bearing components using ceramic materials, such as bearing housings, sleeves, and balls, based on customer needs. Air bearings use compressed air to create a gas film between the bearing and shaft, enabling nearly frictionless rotation or movement. Ceramic air bearing parts offer high precision, low friction, high-temperature resistance, and corrosion resistance, ensuring equipment efficiency and longevity.

Insulating Ring

Ceramic insulating rings are another important ceramic component in ion implantation equipment. Their primary function is to provide electrical insulation during the ion implantation process, preventing current leakage and electrical interference. Insulating rings are typically installed between the electrodes of the ion implantation equipment to serve as electrical insulators. Their dimensions and shapes are determined based on the specific requirements of the equipment, and they can be circular, annular, or other shapes.