General Semiconductor Applications and Wafer Processing
As a partner in the field of precision ceramic parts technology solutions, JFM is committed to providing comprehensive solutions for semiconductor equipment, including charge dissipation end effectors, heaters, lifting pins, and vacuum break filters, among other high-performance products. Choosing high-purity, high-performance ceramic materials is crucial. Common materials include oxides (Al2O3), silicon nitride (Si3N4), aluminum nitride (AlN), and silicon carbide (SiC), each offering distinct advantages to meet the requirements of semiconductor equipment for high cleanliness, high stability, high precision, high efficiency, and high reliability.
Ceramic End Effector
Ceramic arms are utilized in micro and nano manufacturing processes for the precise execution of key tasks such as the movement, transport, and positioning of semiconductor wafers. When in contact with items, they do not leave behind contaminating fine particles, do not generate charged particles or release metal ions, and their conductivity and high thermal conductivity help remove residual charge from reaction byproducts, preventing contamination of semiconductor parts.
Lifting Rings
Lifting rings effectively enhance the stability of wafers during processing, ensuring precise alignment of wafers in each processing step. The versatility of lifting rings makes them suitable for various semiconductor processing techniques, including chemical vapor deposition (CVD) and physical vapor deposition (PVD), and allows them to adapt to different operational needs.
