Vacuum Chuck

Product Description

Ceramic vacuum chucks made from porous ceramics, alumina, and silicon carbide feature high thermal conductivity, insulation, corrosion resistance, and low thermal expansion. They are widely used in semiconductor wafer manufacturing, enabling uniform wafer attachment, preventing electrostatic damage, and ensuring easy cleaning and maintenance.
Product Properties

High Temperature Resistance

Abrasion Resistance

Rotten Resistance

High Invasiveness

High Strength And High Hardness

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		Alumina							Silicon Carbide
Item (JFM)	Unit	JC-AZ025A	JC-A995A	JC-A990A	JC-A995A	JC-A997A	JC-A997B	JC-A999A	JC-SC101
Physical Property
Content	%	-	95.0%	99.0%	99.5%	99.7%	99.7%	99.9%	-
Colour		Milky White	White	White	Milky White	Milky White	Milky White	White	Black
Density	g/cm3	4.4	3.7	3.8	3.9	3.92	3.94	3.95	3.15
Mechanical Behavior
Vickers Hardness	GPa	15	13.7	15.2	16.0	17.2	17.2	17.5	23
Bending Strength	Mpa	650	350	310	360	380	380	400	500
Compressive Strength	Mpa	-	-	2160	2350	2380	2400	2560	3900
Young's Modulus	GPa	320	320	360	370	380	380	380	420
Poisson's Ratio	/	0.25	0.23	0.23	0.23	0.23	0.23	0.23	0.17
Fracture Toughness	Mpa.m1/2	5	3-4	3-4	4	4.8	5	5.4	3.2
Thermal Propert
Coefficient of Thermal Expansion	10-6/°C	9	7.2	7.2	7.2	7.2	7.2	7.2	4.3
Thermal Conductivity	W/(m.K)	19	24	29	32	32	32	34	160
Specific Heat Capacity	J/(g.K)	-	0.78	0.79	0.78	0.79	0.79	0.78	0.67
Maximum Operating Temperature	°C	1600	1500	1600	1600	1600	1600	1600	1600
Electrical Property
Dielectric Strength	kv/mm	-	15	15	15	15	15	15	-
Dielectric Constant （1MHz）	-	-	9.4	9.9	9.9	9.9	9.9	9.9	-
Dielectric Losses （1MHz）	（X10-4）	-	4	2	1	1	1	1	-
Volume Resistivity 20℃	Ω.cm	>10¹²	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	10⁸
Volume Resistivity 300℃	Ω.cm	-	10¹⁰	10¹⁰	10¹³	10¹³	10¹³	10¹³	-

* This data is an example of test results in lab. It may be different from the actual characteristics in a particular manufacturing process.

* This data is an example of test results in lab. It may be different from the actual characteristics in a particular manufacturing process.

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