Vacuum Chuck

Product Description

Metal vacuum chucks, made from stainless steel and aluminum alloy, provide strong adhesion for handling heavy semiconductor materials. They offer good durability and impact resistance, enabling quick heat transfer and good conductivity, aiding in static dissipation. Widely used in semiconductor and automation sectors for efficient gripping and transporting tasks.
Product Properties

High Thermal Conductivity

High Strength

Good Electrical Conductivity

High Temperature Resistance

Strong Impact Resistance

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		Aluminum and Aluminum Alloys		Titanium and Titanium Alloys		Stainless Steel
Item (JFM)	Unit	JA-5052	JA-6061	JT-TC4	JT-TC6	JS-304	JS-316L
Physical Property
Colour		Grey & Silver White	Grey & Silver White	-	-	-	-
Density	g/cm3	2.68	2.73	4.44	4.5	8	8
Mechanical Behavior
Vickers Hardness	GPa	12H	95-110HV	250-350HV	-	0.2	0.2
Bending Strength	Mpa	100-240	240	1200-1500	-	170	170
Compressive Strength	Mpa	120	350-500	90-1400	-	170	170
Young's Modulus	GPa	69-73	68.1-72.4	109	113	200	200
Poisson's Ratio	/	0.33	0.33	0.34	0.3	0.3	0.3
Mpa	65-340	49-305.1	≥825	≥840
Tensile Strength	Mpa	≥150	121.2-328.5	895-1150	935-1180
Extensibility, A	%	≥1	≥4	≥8	≥8
Hardness		HB ≥45	HB120-140	HB300	HB285-340	HB187	HB187
Fracture Toughness	Mpa.m1/2	-	-	20-50	-	30-50	30-50
Thermal Property
Coefficient of Thermal Expansion	10-6/°C	13	19.29-23.8	17	-	17.3	17.3
Thermal Conductivity	W/(m.K)	-	2.51	6.8	-	16.3	16.3
Specific Heat Capacity	J/(g.K)	-	0.9	0.52-0.57	-
Maximum Operating Temperature	°C	550	550	1200	-	580	580
Electrical Property
Dielectric Constant （1MHz）	-	-	3.2-4.1	56	-	1.02	1.02

* This data is an example of test results in lab. It may be different from the actual characteristics in a particular manufacturing process.

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