Ceramic Parts for Wafer Inspection Equipment
Used in wafer fixtures, vacuum chucks are widely applied in the semiconductor industry where precise gripping and fixation are required. They serve as fixed fixtures for wafer thinning and cutting processes. JFM offers a variety of precision ceramic vacuum chucks designed to maximize airflow distribution uniformity and suction stability, thereby achieving stable fixation of wafers. Custom non-standard chucks can be designed according to user requirements. The main characteristics of the wafer vacuum chucks include: high flatness and parallelism、dense and uniform structure with high strength、good permeability and uniform adhesion、easy to adjust.
Vacuum Chucks
Used in wafer fixtures, vacuum chucks are widely applied in the semiconductor industry where precise gripping and fixation are required. They serve as fixed fixtures for wafer thinning and cutting processes. JFM offers a variety of precision ceramic vacuum chucks designed to maximize airflow distribution uniformity and suction stability, thereby achieving stable fixation of wafers. Custom non-standard chucks can be designed according to user requirements. The main characteristics of the wafer vacuum chucks include: high flatness and parallelism、dense and uniform structure with high strength、good permeability and uniform adhesion、easy to adjust.
Polishing Discs
In the wafer manufacturing process, polishing discs are used for chemical mechanical polishing (CMP) to achieve the flattening of the wafer surface. Ceramic polishing discs need to possess high hardness, high wear resistance, good flatness, and uniformity, and they must withstand high-speed rotation and the corrosion of polishing liquids. Common ceramic polishing disc materials include alumina ceramic and silicon carbide ceramic.
