Ceramic Parts for Plasma Etching Equipment
Using high-purity fine ceramic material parts specifically designed by JFM for harsh plasma etching, we maximize the fulfillment of the high purity requirements and extreme environmental demands of plasma etching. This includes the main components made of ceramic materials used in plasma etching equipment, such as window mirrors, focus rings, electrostatic chucks, nozzles, chambers, and gas dispersion discs.
Related parts：
Related materials：
- ·Oxides: Aluminum oxide ceramics, Zirconium oxide ceramics, Yttrium oxide ceramics
- ·Nitrides: Aluminum nitride ceramics, Silicon nitride ceramics, Boron nitride ceramics
- ·Carbides: Silicon carbide ceramics
Chamber Liner
JFM supplies high-purity precision ceramic components specifically designed for demanding plasma etching processes, perfectly suited for the high-purity requirements and extreme conditions of plasma etching. These include windows, focus rings, electrostatic chucks, nozzles, chambers, gas distribution plates, and other key ceramic parts used in plasma etching equipment.
Ceramic Windows
Ceramic windows are used in etching equipment to adsorb reaction byproducts during the process, reducing the frequency of inline defects, improving yield, and extending PM cycles. They also serve as auxiliary seals to ensure vacuum integrity within the reaction chamber. As critical components of etching equipment, they must possess good sealing and corrosion resistance to prevent etching gas leakage and external impurities from entering the reaction chamber. Materials such as alumina ceramic and silicon carbide ceramic are commonly used for the covers.
Ceramic Nozzle
The main function is to precisely control the flow rate and direction of the etching gas. Due to the need to withstand the high-speed flow and corrosion of the etching gas, there are high requirements for the material's corrosion resistance, hardness, and wear resistance. Common nozzle materials available on the market include alumina ceramic and silicon carbide ceramic. We can provide custom processing based on customer drawings and samples.
Ceramic Substrate
Used for manufacturing components such as bases, the ceramic plate in the base structure serves to support and hold the substrate. It requires good flatness, mechanical strength, and high-temperature resistance. Common materials include advanced options like alumina ceramic and aluminum nitride ceramic.
